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Semiconductor wafer visual inspection system
How to automate visual inspection, which is the most burdensome inspection process today, has become an important theme in order to cope with the increased production of semiconductors, a market that is expected to expand further in the future. RAYSENS was developed to solve this problem.
・Ultra-low noise macro-optical sensor to detect minute changes in various wafer surfaces with high sensitivity
・High throughput by dedicated optics, integrated software and highly efficient transfer loader
・Wide range of inspection from transparent wafers to non-transparent wafers
・Application software enables seamless operation from machine control to image acquisition and judgment
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