ICSCRM2026

Tokyo Electron Device will exhibit panels at the ITES booth at “ICSCRM2026” held at Pacifico Yokohama North in Yokohama City, Kanagawa Prefecture, from Sunday, September 27 to Friday, October 2, 2026.

Date and time of the event: September 27, 2026 ～ October 02, 2026
Venue: Pacifico Yokohama North 1-1-2 Minatomirai, Nishi-ku, Yokohama-shi, Kanagawa Prefecture,Japan Participation
Participation cost: Paid Admission Registration Required
Booth Number: Booth L-4 (inside ITES's booth)
Exhibition URL: https://icscrm2026.org/

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Overview

The exhibition includes a poster display of the fully automated visual inspection device RAYSENS, equipped with automatic defect classification and capable of performing visual inspection of SiC bare wafers with high sensitivity and throughput from Tokyo Electron Devices,
ITES will showcase solutions utilizing the latest technology, including a panel exhibition of the “SiC Latent Defect Inspection Device / Power-On Degradation Simulator ITS-SCX100,” which expands and visualizes latent BPD within SiC wafers by UV irradiation.

Other Exhibitions Various papers related to SiC are presented daily.
We sincerely look forward to welcoming you to the event.

*ICSCRM (International Conference on Silicon Carbide and Related Materials) is an international conference on silicon carbide (SiC) and related materials.

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